Design Features
- rigid metallic construction
- available flow ranges starting from 0 to 10 sccm up to 0 to 100 slpm
- maximum pressure of 1000 psig (70 bars)
- 0-5 Vdc or 4-20 mA signals
- leak integrity 1 x 10-9 smL/sec of helium
- accuracy of ± 1% full scale
- totalizer option
- circuit protection
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DFM series programmable thermal mass flow meter with digital signal processing, and digital LCD display with back light.
MPN | DFM Series |
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